发明名称 Mask and method for manufacturing the same, method for manufacturing display, method for manufacturing organic electroluminescent display, organic electroluminescent device, and electronic device
摘要 A mask includes a substrate which includes a front side and a back side and is provided with through-holes; and a film which adjusts a shape of the substrate provided above at least one of the front side and the back side of the substrate. A method of manufacturing a mask includes the steps of: providing a substrate having a front side and a back side; forming a film which adjusts a shape of the substrate above at least one of the front side and the back side of the substrate; and drilling through-holes in the substrate.
申请公布号 US7754274(B2) 申请公布日期 2010.07.13
申请号 US20040985671 申请日期 2004.11.11
申请人 SEIKO EPSON CORPORATION 发明人 KUWAHARA TAKAYUKI;YOTSUYA SHINICHI
分类号 B05D5/12;H05B33/10;C23C14/04;C23C16/00;G03F7/12;H01L51/50;H01L51/56 主分类号 B05D5/12
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