发明名称 |
Mask and method for manufacturing the same, method for manufacturing display, method for manufacturing organic electroluminescent display, organic electroluminescent device, and electronic device |
摘要 |
A mask includes a substrate which includes a front side and a back side and is provided with through-holes; and a film which adjusts a shape of the substrate provided above at least one of the front side and the back side of the substrate. A method of manufacturing a mask includes the steps of: providing a substrate having a front side and a back side; forming a film which adjusts a shape of the substrate above at least one of the front side and the back side of the substrate; and drilling through-holes in the substrate.
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申请公布号 |
US7754274(B2) |
申请公布日期 |
2010.07.13 |
申请号 |
US20040985671 |
申请日期 |
2004.11.11 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
KUWAHARA TAKAYUKI;YOTSUYA SHINICHI |
分类号 |
B05D5/12;H05B33/10;C23C14/04;C23C16/00;G03F7/12;H01L51/50;H01L51/56 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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