| 摘要 |
The present invention relates to a method and a system for treating spent abrasive slurry obtained from a process for cutting a body of a substrate material into wafer-like slices, said slurry comprising a lubricant fluid, unspent abrasive particles and fines. The method comprises separating the spent slurry in a first sedimentation step into a solids concentrate comprising unspent abrasive particles and a solids depleted slurry; and subsequently separating the solids depleted slurry by cross-flow filtration into a fines containing fraction and a solids and fines depleted regenerated lubricant fluid. The corresponding system comprises a first sedimentation device having an inlet for spent abrasive slurry, a sedimentation unit, a first outlet for discharging a solids concentrate and a second outlet for discharging a solids depleted slurry from said sedimentation unit; a cross-flow filtration device having an inlet for said solids depleted slurry in fluid communication with said second outlet of said sedimentation device, a first outlet for discharging a fines containing fraction and a second outlet for discharging a solids and fines depleted regenerated lubricant fluid from said cross-flow filtration device; and a conduit means providing fluid communication between said second outlet of said first sedimentation device and said inlet of said cross-flow filtration device.
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