SUBSTRATE WITH PLANARIZING COATING AND METHOD OF MAKING SAME

摘要

A substrate coated with a composition so as to form a planarizing layer defining a planarized surface of the substrate having an RMS surface roughness equal to or less than about 1 nm. The composition comprises in polymerized form at least one or more acrylate containing monomers, oligomers, or resins and a plurality of inorganic oxide particles that are smaller than or equal to 20 nm in size.