发明名称 A TEST PATTERN OF SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING A TEST PATTERN THEREOF
摘要 PURPOSE: The test pattern of a semiconductor device and a method for fabricating the same are provided to prevent the malfunction of the semiconductor device by recognizing a mis-overlaid gate pattern on an active region. CONSTITUTION: A gate pattern(120) is overlaid on an active region(110). Based on the gate pattern, the left area of the active region is different from the right are of the active region. A first metal pattern and a second metal pattern are connected with both sides of the gate pattern. A measuring unit(140) measures the current of the gate pattern in contact with the active region. Whether the measured current is not the same as a pre-set reference value, the mis-overlaid gate pattern on the active region is recognized.
申请公布号 KR20100078388(A) 申请公布日期 2010.07.08
申请号 KR20080136641 申请日期 2008.12.30
申请人 DONGBU HITEK CO., LTD. 发明人 CHO, PYOUNG ON
分类号 H01L23/544 主分类号 H01L23/544
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