MODELING STRUCTURE FOR SIMULATION OF TRAPEZOIDAL METAL LINE

摘要

PURPOSE: A modeling structure for simulating a trapezoidal metal wiring is provided to improve the accuracy of a simulation by analyzing an operational frequency which is changed according to the change of currents and voltages in a semiconductor device. CONSTITUTION: A modeling structure for simulating a trapezoidal metal wiring includes an upper part(10), a lower part(30), and a central part(20). The upper part has an A width. The lower part has a B width which is wider than A. The central part has an average width of the upper part and the lower part. The height of the central part is that the height of the modeling structure subtracts the heights of the upper part and the lower part. Each height of the upper part and the lower part is respectively half of the widths of the upper part and the lower part.