| 摘要 |
PURPOSE: A substrate transfer apparatus is provided to prevent a process failure from being generated by transferring a substrate while maintaining a horizontal state by the application of different sized rollers which are contacted to the bottom of a substrate. CONSTITUTION: A substrate transfer apparatus(s) comprises a long support block(10) arranged along the transfer direction of the substrate and is mutually parallel, a rotating shaft(20) wherein both ends of the rotary shaft is supported on a pair of the support blocks and which is rotated according to the drive of a driving part(30), and a roller(40) which is coupled to the rotary shaft and transfers the substrate while revolving together with the rotary shaft.
|
