| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for conveying two or more wafers for vacuum processing. SOLUTION: The vacuum processing equipment provides a hand section 155 having two or more fingers 156 in a carry in vacuum chamber 112a so that two or more substrates 31 are arranged on respective fingers 156 in an air atmosphere such that both edges are projected, exhausts air from the carry in vacuum chamber 112a, and moves the hand section 155 to a processing vacuum chamber 113 by connecting to the processing vacuum chamber. A lifting mechanism 161 having two or more lateral bars 162 is provided in the processing vacuum chamber 113, and the lateral bars 162 are moved up and descended with both ends of a substrate on one finger placed on the two lateral bars for vacuum processing of them on a placement table 165. Carrying in and out the substrates can be done with no use of pins or trays. COPYRIGHT: (C)2010,JPO&INPIT
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