| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspecting apparatus for accurately and quickly identifying the actual probe pin which is a target. SOLUTION: A test probe 10 is provided which is specified to be a reference voltage (voltage value Vref). A process part 7 performs a pin identifying process in which a measurement part 6 measures an electric potential V1 of each probe pin 2a, and based on the measured electric potential V1 and the voltage value Vref of reference potential, such probe pin 2a as contacting to the test probe 10 is identified. It also performs a display process in which images representing the probe pins 2a are displayed while corresponded to the positions of the probe pins 2a on a display part 9 based on positional information Dp stored in a storage part 8, and the image of a probe pin 2a having been identified in the pin identifying process is displayed in a first mode different from the image of the probe pin 2a of which the electric potential V1 differs from the reference potential. COPYRIGHT: (C)2010,JPO&INPIT |
