Trägerplattevorrichtung,申请号DE20036032681-传众专利搜索

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发明名称	Trägerplattevorrichtung
摘要
申请公布号	DE60332681(D1)	申请公布日期	2010.07.08
申请号	DE20036032681	申请日期	2003.01.20
申请人	EBARA CORP.	发明人	SHINOZAKI, HIROYUKI;SOBUKAWA, HIROSI;YOSHIKAWA, SHOJI
分类号	H01L21/00;G03F7/20;H01L21/68	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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