| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sound pressure space differential detection sensor capable of being miniaturized. Ž<P>SOLUTION: The sound pressure space differential detection sensor includes two diaphragms 1 having flat rectangular solid shapes which are arranged in such a manner that thickness directions are aligned and longitudinal directions are perpendicular to each other, a package 2 having sandwiching sections 20 sandwiching the respective diaphragms 1 from both sides in a lateral direction with a gap therebetween, support bodies 3 which are arranged at the diaphragms 1 by two pieces, each support body 3 suspended between a position at the center in the longitudinal direction of one end in the lateral direction and a corresponding sandwiching section 20 of each package 2, and a displacement detecting means (not shown) for detecting displacement in the thickness direction on each of measuring points A to D at both ends of each of the respective diaphragms 1 in the longitudinal direction. Since a sound pressure space differential in one direction can be detected by one diaphragm 1, the sound pressure space differential detection sensor can be miniaturized as compared to the case that a plurality of diaphragms are used for detecting a sound pressure space differential in one direction. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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