发明名称 MAINT RACK FOR BATH
摘要 PURPOSE: A worktable of a cleaning bath is provided to reduce a maintenance and repair time of the cleaning bath by easily transferring equipment when a large cleaning bath is maintained and repaired. CONSTITUTION: A rail(20) is formed on both sides of a cleaning bath(10) in a longitudinal direction of a cleaning bath. A worktable includes a plate, a plurality of supports(32) and a moving unit. The plate is separated from the upper side of the cleaning bath and receives equipment. The plurality of supports is integrated or combined with the plate and is extended to support the plane. A moving unit is located between the rail and the support and moves the support along the rail. A locking unit selectively fixes a movable worktable to the rail.
申请公布号 KR20100078277(A) 申请公布日期 2010.07.08
申请号 KR20080136492 申请日期 2008.12.30
申请人 K.C.TECH CO., LTD. 发明人 LIM, SOK TAEK;JEON, YONG CHIL
分类号 H01L21/02;G02F1/13;H01L21/304 主分类号 H01L21/02
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