| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for detecting a colored foreign substance contained in a quartz powder material at a high precision even in the case that the colored foreign substance, in particular, a light colored foreign substance such as an iron-based contaminant, an organic substance based contaminant and a carbon-based contaminant is contained in the quartz powder. SOLUTION: A detector 1 includes a material supplying means 2 for continuously supplying the quartz powder material at a given rate, a belt conveying means 3 for conveying the quartz powder material Q continuously supplied from the material supplying means 2, a first light emitting means 4 emitting light with a prescribed wavelength, a light diffusing means 5 for converting the light emitted from the first light emitting means 4 into scattering light to irradiate the quartz powder material Q conveyed by the belt conveying means 3, and a color imaging means 6 for continuously photographing color images of the quartz powder material Q. By irradiating the quartz powder material Q with the scattering light from the light diffusing means 5, the shading of the color images photographed by the color imaging means 6 is clarified, and the colored foreign substance contained in the quartz powder material Q is detected. COPYRIGHT: (C)2010,JPO&INPIT |
