| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator achieving increased speed by quick and smooth acceleration and deceleration by simple control, and suitable for use in a linear guide bearing device or the like. Ž<P>SOLUTION: A first drive motor 109 is brought under speed control for following a target speed and speed control for following an actual speed of the first drive motor 109 is exerted on a second drive motor 110, so that both the two drive motors 109, 110 can be feedback-controlled in a manner that mutual movements do not interfere with each other. In the speed control of the second drive motor 110, phase delay by the control is reduced by adding a command value of the first drive motor 109. With this, there is an advantage that response of the control and damping performance are improved. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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