| 摘要 |
PURPOSE: A pattern for detecting a short-circuiting is provided to correctly detect whether a short-circuiting is generated in a metal wiring by arranging the pattern for detecting a short-circuiting in a chip. CONSTITUTION: A pattern for detecting a short-circuiting(200) includes a first metal wiring and a second metal wiring. The first metal wiring has the same length and width as those of a wiring in the chip of a semiconductor substrate. The second metal wiring has the same length and width as those of the wiring in the chip of a semiconductor substrate. The first and the second wirings are alternately arranged. Whether the short-circuiting of the wirings is generated is confirmed by applying positive and negative power to one end and the other end of the wirings. The pattern is arranged in the chip of the semiconductor substrate.
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