,申请号JP20060158873-传众专利搜索

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发明名称
摘要
申请公布号	JP4496373(B2)	申请公布日期	2010.07.07
申请号	JP20060158873	申请日期	2006.06.07
申请人		发明人
分类号	H01L21/285;C23C14/34;H01L21/28	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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