| 摘要 |
PURPOSE: A light source device is provided to prevent the twinkling of a light source although high temperature plasma is continuously vibrating along the optical axis by irradiating an energy beam towards a bright spot formed near the leading end of an electrode. CONSTITUTION: A discharging lamp(1) is arranged to face a pair of electrodes. A discharge medium is sealed in the discharge lamp. An energy beam irradiation part(3) irradiates an energy beam towards the gap between a pair of electrodes. The energy beam irradiation part irradiates an energy beam towards a bright spot which is formed in the leading end of an electrode when the discharging lamp is turned on by feeding an electrode. A position controlling part(4) adjusts the location of the energy beam irradiation part.
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