| 摘要 |
The present invention herein provides a bearing-support structure for a turbo-molecular pump in which a rotation axis is rotatably supported by rolling bearings and the bearing-support structure permits the absorption of any fine vibrational motion generated at the bearings and the elimination of any heat generated by these bearings and the structure further has a long service life and high safety. In the bearing-support structure for a turbo-molecular pump, ball bearings 4, 5, which rotatably support a rotation axis 1, are fitted in an upper first sleeve 6 and a lower second sleeve 7 respectively, while the outer periphery and one end face of the outer ring of each bearing 4, 5 are pressed against each of these corresponding sleeves, each of the upper first sleeve 6 and the lower second sleeve 7 is formed into a double structure comprising an inner sleeve and an outer sleeve, a gel layer 6c or 7c having a desired heat conductivity is arranged between these inner and outer sleeves and O-rings 6d, 6e or O-rings 7d, 7e are positioned before and behind the gel layers 6c, 7c to thus seal these gel layers 6c, 7c. |
