| 摘要 |
PURPOSE: A cooling apparatus for a semiconductor device manufacturing system is provided to rapidly discharge air from a deionized water filter assembly by sensing the level of deionized water in the deionized water filter assembly. CONSTITUTION: An ultra-pure water tank(110) stores ultra-pure water. A circulation line(120) offers a path for circulating and feeding ultra-pure water. A heat exchanger(130) cools the ultra-pure water. A DI(deionized) filter assembly(140) is installed in the circulation line. A water level sensor(150) measures the level of the ultra-pure water filled inside the DI filter assembly. An air discharge module(160) discharges the air entering the DI filter assembly to outside.
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