| 摘要 |
<p>PURPOSE: A copolymer including bis(phenylthio) propyl group chromophores and an organic anti-reflective coating layer are provided to obtain excellent storage stability, to be used for manufacturing optical materials including an organic anti-reflective coating layer due to high optical absorption ability and refractive index, to effectively control diffused reflection which is generated from the lower part of photoresist, and to effectively eliminate standing wave according to change of a light source and the photoresist thickness. CONSTITUTION: A copolymer including bis(phenylthio) propyl group chromophores is synthesized through copolymerization of a monomer which is marked as a chemical formula 1 and a monomer which is marked as a chemical formula 2, a chemical formula 3, or a chemical formula 4. In the chemical formula 1, R1 is hydrogen or a methyl group and n is an integer of 1-5. R2 and R3 are an alkyl group with C1-C5 or an alkoxy group with C1-C5. In the chemical formula 2, R4 is the hydrogen or the methyl group and x is an integer of 1-6. In the chemical formula 3, R5 is the hydrogen or the methyl group and y is an integer of 1-6. In the chemical formula 4, R6 is the hydrogen or the methyl group and R7 is the hydrogen or an alkyl group with C1-C6.</p> |
