| 摘要 |
<p>PURPOSE: An organic electronic device, an organic electronic device manufacturing method, and an organic electronic device manufacturing apparatus are provided to prevent the inflow of oxygen and water by including a seaming member having high quality sealing. CONSTITUTION: An organic electronic device comprises organic devices(11, 12) and a sealing film(14). The organic device is formed on a target(10). An encapsulating layer covers the organic device. The sealing film is a SiXON film which is X-O combination of 10 atm%.</p> |
