发明名称 METHOD FOR PRODUCING EXHAUST GAS CATALYST BY USING COAXIAL VACUUM ARC VAPOR DEPOSITION SOURCE
摘要 <P>PROBLEM TO BE SOLVED: To provide method for depositing a nanoparticle of an exhaust gas catalyst, and a method for producing the exhaust gas catalyst. <P>SOLUTION: A pulse voltage is impressed between a trigger electrode 13 and a cathode 12 in a vacuum atmosphere by using a coaxial vacuum arc vapor deposition source 1 to generate trigger discharge. A capacitor and a DC power source are connected to each of the cathode 12 and an anode 11, and a DC discharge voltage of 60-100 V is impressed while keeping the capacitance of the capacitor within 360-1,080 &mu;F to induce arc discharge intermittently. Charged particles of a catalytic metal to be produced are supplied to/vapor-deposited on the surface of a carrier being alumina powder or other alumina powder, in which an oxide of a metal consisting of zirconium or lanthanoid is mixed, to obtain the catalyst consisting of the catalytic metal nanoparticle-deposited carrier. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010142699(A) 申请公布日期 2010.07.01
申请号 JP20080320327 申请日期 2008.12.16
申请人 KUMAMOTO UNIV;ULVAC JAPAN LTD 发明人 MACHIDA MASATO;AGAWA YOSHIAKI;TSUKAHARA NAOKI;MURAKAMI HIROHIKO
分类号 B01J37/02;B01D53/94;B01J23/63;C23C14/14;C23C14/24;F01N3/10;F01N3/28 主分类号 B01J37/02
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