| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromagnetic induction type position detection device and an electromagnetic induction type position detection method capable of performing gap adjustment work easily and efficiently. Ž<P>SOLUTION: When position detection is performed, an induced voltage V=K(g(X))×I×sin(k(X-α))×sin(ωt) is generated in a scale-side coil by causing a first exciting coil Is=I×cos(kα)×sin(ωt) to flow in a first slider-side coil, and causing a second exciting current Ic=-I×sin(kα)×sin(ωt) to flow in a second slider-side coil, and based on the induced voltage V, a movement position X of the slider is found. When gap adjustment is performed, an induced voltage V'=K(g(X))×I×sin(ωt+kX) is generated in the scale-side coil by causing a first exciting current Is'=I×cos(ωt) to flow in the first slider-side coil, and causing a second exciting current Ic'=I×sin(ωt) to flow in the second slider-side coil, and an amplitude value K(g(X))×I of the induced voltage V' is acquired. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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