发明名称 SEMI-CONDUCTOR WAFER AND METHOD OF PREPARATION THEREOF
摘要 PURPOSE: A semiconductor wafer and a method for manufacturing the same are provided to prevent chipping defects of a wafer by maintaining edge profiles in curve shape after a back grinding process. CONSTITUTION: A first region(100) is located on the upper side of a wafer. The first region is a region to be a chip. A second region(200) is located on the lower side of the first region. The second region is polished during a back-grinding process. The edge profiles(101, 102) of the first region are curve shape. The lateral profile(103) of the first region is curve shape.
申请公布号 KR20100073579(A) 申请公布日期 2010.07.01
申请号 KR20080132292 申请日期 2008.12.23
申请人 DONGBU HITEK CO., LTD. 发明人 PARK, YOUNG TAEK
分类号 H01L21/302;H01L21/304 主分类号 H01L21/302
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