| 摘要 |
PURPOSE: A wafer alignment device is provided to prevent damage to a wafer and a unit process by correcting the misalignment of the wafer when the wafer is accepted into a spread box. CONSTITUTION: A spray box comprises slots(151a). The slots are installed to be opposite to each other to receive a wafer therein. An alignment the both sides of the wafer received into the spray box to align the position of the wafer. The alignment is comprised of at least a pair of cylinder and a pair of louver. The cylinder is installed at both sides of the spray box and is movable. The louver aligns the wafer.
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