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发明名称
Beschichtungsvorrichtung mit grossflächiger Anordnung von drehbaren Magnetronkathoden
摘要
申请公布号
DE502004010804(D1)
申请公布日期
2010.04.08
申请号
DE200450010804T
申请日期
2004.05.05
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
BANGERT, STEFAN;FUCHS, FRANK;LINDENBERG, RALPH;LOPP, ANDREAS DR.;SCHUESSLER, UWE;STOLLEY, TOBIAS
分类号
H01J37/34;C23C14/34;C23C14/35;C23C14/56
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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