X-RAY INSPECTION METHOD AND X-RAY INSPECTION APPARATUS

摘要

An X-ray inspection apparatus (100) is provided with: an X-ray source (10); an X-ray detector (23); an X-ray detector drive section (22); an image acquisition control mechanism (30) which controls drive of the X-ray detector (23) performed by means of the X-ray detector drive section (22) and acquisition of image data from the X-ray detector (23); a mechanism (20) for driving a subject to be inspected, which moves a subject to be inspected (1); an X-ray source control mechanism (60); and a calculating section (70).  The X-ray source control mechanism (60) makes the X-ray source (10) output X-rays, based on the instruction given from the calculating section (70).  An image acquisition control mechanism (30) moves the X-ray detector (23) to a plurality of image pickup positions arranged in the Y direction, based on the instruction given from the calculating section (70).  Furthermore, the mechanism (20) for driving a subject to be inspected moves the subject to be inspected (1) in the Y direction based on the instruction given from the calculating section (70) so that the X-ray detector (23) can detect, at each image pickup position, the X-ray that has passed through the subject to be inspected (1).