| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a microstructure, with which a fine projecting and recessing shape with high density and a high taper angle can be formed. <P>SOLUTION: A heat-sensitive layer including a non-heat-sensitive inorganic resist as a main component is formed on a substrate, and a non-heat-sensitive layer including a heat-sensitive inorganic resist as a main component is formed on the heat-sensitive layer. A predetermined mask pattern is formed on the heat-sensitive layer by exposure and development of the heat-sensitive layer. A fine projecting and recessing pattern is formed on the substrate by using the mask pattern and etching the non-heat-sensitive layer. <P>COPYRIGHT: (C)2010,JPO&INPIT |
