| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for easily adjusting the temperature of an electronic component to a set temperature by preventing heat loss of a coolant. SOLUTION: This inspection device M1 for inspecting the characteristics of an acceleration sensor which is an electronic component, includes a temperature adjustment mechanism 30 mounted on a second mounting table 12 for adjusting the temperature of the acceleration sensor, and a rotational mechanism 20 mounted on a first mounting table 11 to rotate the acceleration sensor to a preset angle. The rotational mechanism 20 allows the acceleration sensor to rotate relative to the adjustment mechanism 30. COPYRIGHT: (C)2010,JPO&INPIT |
