| 摘要 |
<P>PROBLEM TO BE SOLVED: To generate an EUV radiation by effectively heating an early plasma by generating a discharge between electrodes as quickly as possible after generation of the early plasma by a laser beam irradiation. <P>SOLUTION: A reset circuit unit 71 flows a reset current to a secondary winding LR3 of a saturable reactor SR3 so that a magnetic flux is generated in the same direction as the residual magnetic flux generated based on the current flowing in the saturable reactor SR3. When a switch SW is on and a magnetic switch SR1 is on, the electric charge stored in a capacitor C0 is transferred to a capacitor C2 to charge it up, and the laser is irradiated to a high temperature plasma material coating the electrode 2a. Thereby, the high temperature plasma material is evaporated to reach the opposite second electrode 2b. The saturable reactor SR3 is on by being saturated by the reset current described above, and a pulse power is immediately applied from the capacitor C2 to the rotating electrodes 2a, 2b, and a large current flows between the electrode 2a, 2b to generate the high temperature plasma. <P>COPYRIGHT: (C)2010,JPO&INPIT |
