METHOD FOR WASHING POLYCRYSTALLINE SILICON, WASHING DEVICE, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON

摘要

Provided is a method for washing polycrystalline silicon comprising an acid rinsing step in which an acidic solution is used and a water rinsing step in which purified water is used after the acid rinsing. In the water rinsing step, the polycrystalline silicon is immersed in a water rinsing tank holding purified water and the purified water inside the water rinsing tank is replaced at least once in order to remove the acidic solution residue from the surface of the polycrystalline silicon. The electrical conductivity (C) of the purified water in the water rinsing tank is measured and the water rinsing step is judged to be completed on the basis of the measured electric conductivity (C).