发明名称 FLASH MEMORY DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 Disclosed are a flash memory device and a method for manufacturing the same. The flash memory device includes a floating gate including adjacent first and second floating gates on a substrate; first and second select gates respectively on the first and second floating gates; an insulating layer between the first floating gate and the first select gate and between the second floating gate and the second select gate; a drain region at outer sides of the first and second select gates; a source region between the first and second select gates; and a metal contact on each of the drain region and the source region. The select gate can be defined as a self-align structure, and the length of the select gate can be controlled depending on the thickness of the material used to form the select gate.
申请公布号 US2010163965(A1) 申请公布日期 2010.07.01
申请号 US20090640600 申请日期 2009.12.17
申请人 KWON YOUNG JUN 发明人 KWON YOUNG JUN
分类号 H01L29/792;H01L21/336 主分类号 H01L29/792
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