| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator in which electrification on a surface layer is reduced, drive is stabilized and reliability is improved even if a drive voltage is increased for further improving a capacity of the electrostatic actuator, and to provide a liquid droplet delivering head equipped with the actuator and a liquid droplet delivering apparatus. SOLUTION: An oscillating board side DLC (diamond-like carbon) film 8 is formed on an oscillating board side insulating film 6 formed on an oscillating board 4, and a fixed electrode side DLC film 9 is formed on a fixed electrode side insulating film 7 formed on a fixed electrode 5. In addition, these DLC films are formed into segment shapes. COPYRIGHT: (C)2010,JPO&INPIT
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