| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin substrate processing apparatus that enables an operator to easily and correctly determined the quality as to whether a device is defective. SOLUTION: The resin substrate processing apparatus includes a holding table for holding a substrate on which devices are formed on regions segmented by lattice-like separation schedule lines, respectively; a processing means for processing the resin substrate held on the holding table; and an image pickup means for picking up an image of the devices. The processing apparatus further includes: an illuminating means for illuminating the devices in image pickup of the devices; and a determining means used to determine whether each device is defective, based on the image picked up by the image pickup means. The illumination means includes at least either a red illumination apparatus or a blue illumination apparatus. COPYRIGHT: (C)2010,JPO&INPIT |
