| 摘要 |
PROBLEM TO BE SOLVED: To provide a cold cathode ionization vacuum gage discharging easily by a discharge inducing member, and suppressing furthermore a time delay between a time when a high voltage is applied and a time when a current starts to flow by discharge; and a cold cathode ionization vacuum gage simplifying a cleaning work of a cathode by replacing the discharge inducing member in the cleaning work of the cathode. SOLUTION: The discharge inducing member 20 includes: a board-like substrate 21; a through-hole 22 formed in the substrate, into which an anode is inserted; a board-like fixing part 23 extending in the oblique direction from the outer edge part of the substrate, and elastically-deformable in the axial direction of the through-hole 22; and a board-like guide part 24 provided on the outer edge part of the substrate facing to the fixing part, and extending in the axial direction of the through-hole. The through-hole 22 is formed by connecting a plurality of long holes 22a radially, and a projection part 21a is formed by adjacent long holes 22a, and the anode 44 is arranged on the center part of the through-hole 22. COPYRIGHT: (C)2010,JPO&INPIT
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