发明名称 Capacitor and Method for Manufacturing the Same
摘要 A capacitor and methods for manufacturing the capacitor are disclosed. The method may include forming a first electrode on a substrate, forming a dielectric layer on the first electrode, the dielectric layer having a first silicon oxide (SiO2) layer, a zirconium-doped hafnium oxide (Zr-doped HfO2) layer and a second silicon oxide layer sequentially, and forming a second electrode on the dielectric layer.
申请公布号 US2010164064(A1) 申请公布日期 2010.07.01
申请号 US20090643821 申请日期 2009.12.21
申请人 KIM HYUN DONG 发明人 KIM HYUN DONG
分类号 H01L29/92;H01L21/02 主分类号 H01L29/92
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