| 发明名称 |
Etching resist |
| 摘要 |
<p>An etching resist containing a metallic oxynitride. The etching resist of the present invention can be suitably used, for example, in the production of a molded article for surface-working an optical member such as a microlens sheet, a light diffusing sheet, a non-reflective sheet, a sheet for encapsulating photosemiconductor elements, an optical waveguide, an optical disk, or a photosensor.</p> |
| 申请公布号 |
EP2202578(A1) |
申请公布日期 |
2010.06.30 |
| 申请号 |
EP20090015884 |
申请日期 |
2009.12.22 |
| 申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;NITTO DENKO CORPORATION |
发明人 |
KURIHARA, KAZUMA;NAKANO, TAKASHI;SHIMA, TAKAYUKI;TOMINAGA, JUNJI;FUJIOKA, KAZUYA;SUEHIRO, ICHIRO |
| 分类号 |
G03F7/00;G02B5/00;G11B7/24;H01L21/308 |
主分类号 |
G03F7/00 |
| 代理机构 |
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