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发明名称
摘要
申请公布号
JP4493718(B2)
申请公布日期
2010.06.30
申请号
JP20080527948
申请日期
2006.08.08
申请人
发明人
分类号
C23C14/14;C23C14/34;C23C14/35;H01L21/28;H01L21/285
主分类号
C23C14/14
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代理人
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