| 摘要 |
Disclosed herein are a noncontact single side probe and an apparatus and method for testing open and short circuits of pattern electrodes. By feeding power to one end of each of the pattern electrodes and sensing an electrical variation value using a noncontact type single side probe device including an exciter electrode and a sensor electrode as a single module, the open and short circuits of pattern electrodes can be tested by one scanning process. Since the open and short circuits of the pattern electrodes are tested using the noncontact type single side probe device, the pattern electrode can be prevented from being damaged due to a contact failure or pressurized contact and the life span of the probe device can increase compared with a contact type probe device.
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