| 发明名称 |
CHEMICAL EQUIPMENT WITH PRE-HEATING FUNCTION AND ITS OPERATING METHOD |
| 摘要 |
<p>PURPOSE: A chemical device with a preheating function and an operating method thereof are provided to reduce the replacement time of a chemical solution by heating the chemical solution according to the purpose of the use. CONSTITUTION: A chemical bath(10) receives a chemical solution of a high temperature. The chemical bath includes an inner storage bath(11). A cooling tank(100) is connected to the chemical solution bath. An inner pipe line(110) in which the chemical solution flows is installed inside the cooling bath. The inner pipe line is formed with a coil shape to maximize the heat exchange area. The chemical solution of the high temperature is above 100 degrees centigrade.</p> |
| 申请公布号 |
KR20100071488(A) |
申请公布日期 |
2010.06.29 |
| 申请号 |
KR20080130222 |
申请日期 |
2008.12.19 |
| 申请人 |
DONGBU HITEK CO., LTD. |
发明人 |
ROH, DUK CHON |
| 分类号 |
H01L21/02;H01L21/027;H01L21/302 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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