PROBE STATION

摘要

A probe station includes a stage unit having a test space for testing a plurality of chips formed on a wafer, a loading unit providing the wafer for the stage unit, a first gas supplying unit disposed on a first sidewall of the stage unit, the first gas supplying unit supplying a first cleaning gas into the test space, and a first gas discharging unit disposed on a second sidewall of the loading unit, the first gas discharging unit discharging the first cleaning gas to remove particles from the test space and the second sidewall facing the first sidewall.