BONDED SEMICONDUCTOR SUBSTRATE INCLUDING A COOLING MECHANISM

摘要

A bonded substrate comprising two semiconductor substrates is provided. Each semiconductor substrate includes semiconductor devices. At least one through substrate via is provided between the two semiconductor substrates to provide a signal path therebetween. The bottom sides of the two semiconductor substrate are bonded by at least one bonding material layer that contains a cooling mechanism. In one embodiment, the cooling mechanism is a cooling channel through which a cooling fluid flows to cool the bonded semiconductor substrate during the operation of the semiconductor devices in the bonded substrate. In another embodiment, the cooling mechanism is a conductive cooling fin with two end portions and a contiguous path therebetween. The cooling fin is connected to heat sinks to cool the bonded semiconductor substrate during the operation of the semiconductor devices in the bonded substrate.