发明名称 METHOD OF MANUFACTURING STRUCTURE AND METHOD OF MANUFACTURING INK JET HEAD
摘要 According to the fine pattern manufacturing method of the invention, the residue of a pattern which is obtained by pressing a mold is prevented from occurring, so that the structure can be more easily manufactured.
申请公布号 US2010159405(A1) 申请公布日期 2010.06.24
申请号 US20090634214 申请日期 2009.12.09
申请人 CANON KABUSHIKI KAISHA 发明人 ISHIKURA HIROE;SUZUKI TAKUMI;SATO TAMAKI;NAITO HIRONO;MORISUE MASAFUMI;SAITO YOSHIKAZU;KANRI RYOJI
分类号 G03F7/20;C08F2/46 主分类号 G03F7/20
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