ATMOSPHERIC PRESSURE GLOW DISCHARGES PLASMA DEVICE BY DC PULSE POWER

摘要

PURPOSE: A DC pulse type atmospheric pressure glow plasma generator is provided to flexibly form a form of an electrode in a coaxial type, a wide-width flat plate type, and a parallel conductive line type by executing atmospheric pressure glow discharge due to a DC pulse voltage. CONSTITUTION: An atmospheric pressure glow plasma generator executes glow discharge by supplying feeding gas for discharging plasma between two electrodes. The atmospheric pressure glow plasma generator applies a DC pulse voltage to the electrode. The DC pulse voltage has a pulse width which has a power applying time point as a starting time in the atmospheric pressure state. The pulse width has a completion time which ranges from the initiation of glow discharge by plasma before the transition to the arc discharge. The DC pulse voltage controls the quality of the glow discharge which is generated by using the duty ratio of a pulse, a frequency, and the size of a pulse as a control variable.