| 摘要 |
The present invention discloses a semiconductor device with an asymmetric channel extension structure capable of storing charges, improving gate oxide reliability, reducing parasitic capacitance and adjusting its channel extension current or turn-on resistance. A gate dielectric is formed on the semiconductor substrate. A gate is formed on the gate dielectric. A first isolation layer is formed over the sidewall of the gate. Dielectric spacers are formed on the sidewall of the first isolation layer. And at least one of the p-n junctions of source and drain regions is formed under the dielectric spacers. A fringing field induced extension region formed adjacent to asymmetric channel under gate dielectric and close to at least one of said doped regions. A threshold voltage adjustment implantation region formed under gate dielectric An anti-punch-through implantation region formed under threshold voltage adjustment implantation region. A pocket ion implantation region formed adjacent or near to at least one of said doped regions. Silicide layer is formed on the gate or the doped regions.
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