MIRROR

摘要

<P>PROBLEM TO BE SOLVED: To prevent the curvature of a surface metallic film of a mirror and a flat plate part heated by incident light to the surface metallic film. Ž<P>SOLUTION: An n-type semiconductor 76d is disposed on one flexible beam 10b and a p-type semiconductor 76a is disposed on the other flexible beam 10a. When an electric current flows between the n-type semiconductor 76d and the p-type semiconductor 76a, heat is transferred between the flat plate part 8 and a substrate 4. That means a Peltier element is formed. The direction of the heat transfer between the flat plate part 8 and the substrate 4 is determined by the direction of the electric current to the Peltier element 90. The surface metallic film 16 or the like is cooled when it is heated and heated when it is cooled. The curvature of the surface metallic film 16 and the flat plate part 18 is prevented by adjusting the temperature of the surface metallic film 16. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž