发明名称 |
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) AND CORRESPONDING MANUFACTURING PROCESS |
摘要 |
An embodiment of a micro-electro-mechanical system of the MEMS type comprising at least one micro-electro-mechanical device of the MEMS type and one junction with a duct suitable to being associated with an external apparatus. Said junction being a printed circuit board PCB comprising at least two layers with juxtaposed faces, a channel being present in at least one face of at least one of said at least two layers suitable for realizing the duct with the juxtaposition of the other face of at least another one of at least two layers.
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申请公布号 |
US2010154519(A1) |
申请公布日期 |
2010.06.24 |
申请号 |
US20090641108 |
申请日期 |
2009.12.17 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
FONTANA FULVIO VITTORIO |
分类号 |
G01N27/416;H05K1/02;H05K3/00;H05K3/30;H05K7/00 |
主分类号 |
G01N27/416 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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