发明名称 |
Systems and methods for an inertial sensor suspension that minimizes proof mass rotation |
摘要 |
The present invention generally relates to systems and methods for an inertial sensor suspension that minimizes proof mass rotation and translation. The system contains a microelectromechanical sensor (MEMS) device for measuring rotation along an input rotation axis. The MEMS device includes at least one substrate, at least one proof mass, and a suspension system. The suspension system includes at least one flexure connecting the at least one proof mass to a substrate and at least one anchored suspension element with a split support beam having a first split portion and a second split portion. The first split portion and the second split portion are of curved shape. |
申请公布号 |
EP2199741(A2) |
申请公布日期 |
2010.06.23 |
申请号 |
EP20090177804 |
申请日期 |
2009.12.02 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
JOHNSON, BURGESS R.;ENGEL, JONATHAN M. |
分类号 |
G01C19/56 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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