Radiation sources and methods of generating radiation,申请号EP20090165403-传众专利搜索

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发明名称	Radiation sources and methods of generating radiation
摘要
申请公布号	EP2154574(A3)	申请公布日期	2010.06.23
申请号	EP20090165403	申请日期	2009.07.14
申请人	ASML NETHERLANDS BV	发明人	LOOPSTRA, ERIK;SCHIMMEL, HENDRIKUS
分类号	G03F7/20;H05G2/00	主分类号	G03F7/20
代理机构		代理人
主权项
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