发明名称 MOSFET AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A MOSFET(Metal Oxide Semiconductor Field Effect Transistor) and a manufacturing method are provided to prevent generation of a leakage current by dispersing a concentration of a stress to a lower edge part of a trench contact. CONSTITUTION: A plurality of trenches(101) is formed with etching a substrate(100). A trench-gate(122) is formed within the trench. A body region(110) is formed on a sidewall of the trench-gate. A part of the trench contact is formed within the substrate. The lower edge part of the trench contact is made of the side with rounded of a bent shape.
申请公布号 KR20100067870(A) 申请公布日期 2010.06.22
申请号 KR20080126459 申请日期 2008.12.12
申请人 DONGBU HITEK CO., LTD. 发明人 SHIN, HYUN SOO
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址