发明名称 Method for producing an optoelectronic component
摘要 A method for producing an optoelectronic component is disclosed. The method includes the steps of providing a substrate, applying a semiconductor layer sequence to the substrate, applying at least two current expansion layers to the semiconductor layer sequence, applying and patterning a mask layer, patterning the second current expansion layer by means of an etching process during which sidewalls of the mask layer are undercut, patterning the first current expansion layer by means of an etching process during which the sidewalls of the mask layer are undercut at least to a lesser extent than during the patterning of the second current expansion layer, and removing the mask layer.
申请公布号 US7742677(B2) 申请公布日期 2010.06.22
申请号 US20070810326 申请日期 2007.06.04
申请人 OSRAM OPTO SEMICONDUCTORS GMBH 发明人 EBERHARD FRANZ;STRAUSS UWE;ZEHNDER ULRICH;WEIMAR ANDREAS;OBERSCHMID RAIMUND
分类号 G02B6/00;H01L33/32;H01L33/38;H01L33/40;H01S5/22 主分类号 G02B6/00
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